In the course of Industry 4.0, the application of high-precision metrology in industrial production increases significantly. To achieve reliable measurement results, the sensitive measuring devices must be decoupled from the surrounding plants and machinery. Therefore, measuring instruments that are integrated into the production line as well as independent measuring machines are vibration-isolated on air springs.
The implementation of the vibration isolation depends on various factors. The layout is particularly based on the factors mass, center of gravity, size and shape, as well as permissible oscillation velocities and accelerations. Small devices can be supported on vibration-isolated laboratory tables for easy manual operation. Larger applications are realized with CFM Air Springs type MAS / MAS-M. They are mounted either underneath the sensitive device itself or under the clamping plate of the measuring machine.
Large measuring machines that perform fast movements on the seismic mass should be equipped with the electronic level control system type EC 303 or µC 300. They feature a high-precision 3-point control of the air springs, allowing an automatic level control of the seismic mass.