SUPPORT OF MICROSCOPES & NANOTECHNOLOGY

Universities, laboratories, and R&D departments have high requirements to the correctness of precise measurements of electron microscopes, spectrometers or the like. To prevent falsified results of sensitive measuring instruments, passive vibration isolation decouples these devices from their surroundings.

The vibration-isolated CFM laboratory table is specifically designed for these purposes. It serves both as vibration isolation and as an ergonomic workplace to comfortably operate the measuring devices. Depending on the customer needs, measuring instruments can also be vibration-isolated directly on air springs type MAS or MAS-M.

Microscopes, measuring devices and production machines in nanotechnology oftentimes tolerate only very little oscillation velocities (µm/sec). Permissible values are categorized in so called Vibration Criteria (VC) curves, which have restrictions as low as hundredth µm. To effectively isolate even these smallest vibrations, concrete foundations are used as inertial masses. Depending on the application, these foundations can weigh multiple hundred tons. CFM Air Springs type GRB are used for these precise vibration isolations, because they have extremely little natural frequencies in horizontal and vertical direction.

Support of microscopes on a vibration-isolated laboratory table

Support of microscopes on a vibration-isolated laboratory table

Seismic mass with air springs type GRB at Leiden University

Seismic mass with air springs type GRB at Leiden University

Vibration Criteria (VC) for isolation of an electron microscope at Peter Grünberg Institute of FZ Jülich

Vibration Criteria (VC) for isolation of an electron microscope at Peter Grünberg Institute of FZ Jülich

Air springs type GRB at Ernst Ruska-Zentrum Jülich

Air springs type GRB at Ernst Ruska-Zentrum Jülich